Title :
An 8×1 micromachined micro-Fresnel lens array for free-space optical interconnect
Author :
Lee, S.S. ; Lin, L.Y. ; Pister, K.S.J. ; Wu, M.C. ; Lee, H.C. ; Grodzinski, P.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fDate :
31 Oct-3 Nov 1994
Abstract :
A micromachined 8 x 1 vertical three-dimensional micro-Fresnel lens array and its hybrid integration with a self-aligned vertical cavity surface emitting laser (VCSEL) array have been demonstrated for the first time. With their unique three-dimensional and array structures, they are suitable for integration with other similarly fabricated micro-optical components such as rotatable mirrors, gratings and beam-splitters as well as other active micro-optical elements. This new technique has great potential for free-space optical interconnects
Keywords :
optical fabrication; VCSEL; fabrication; free-space optical interconnect; hybrid integration; micro-optical components; micromachining; self-aligned vertical cavity surface emitting laser array; vertical three-dimensional micro-Fresnel lens array; Lenses; Micromachining; Optical arrays; Optical device fabrication; Optical interconnections; Optical surface waves; Semiconductor laser arrays; Substrates; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1470-0
DOI :
10.1109/LEOS.1994.586983
