Title :
Stress sensitivity of SAW rayleigh waves on lithiumniobate and its application in pressure sensor design
Author :
Bruckner, G. ; Schicker, J. ; Schlupf, P.
Author_Institution :
Carinthian Tech Res. AG, Villach, Austria
Abstract :
A combination of experimental investigation and FEM simulation was used to obtain the sensitivity of two Rayleigh cuts on lithiumniobate LN YZ with Euler angles of (0°, 90°, 90°) and LN 128 (0°, 38°, 0°) to stress and strain. The obtained stress sensitivity was used in designing, fabricating and testing a delay line based membrane pressure sensor with temperature compensation proposed for medical application.
Keywords :
Rayleigh waves; finite element analysis; internal stresses; lithium compounds; pressure sensors; surface acoustic wave delay lines; Euler angles; FEM simulation; LN YZ; LiNbO3; Rayleigh cuts; SAW Rayleigh waves; delay line based membrane pressure sensor temperature compensation; lithium niobate; medical application; pressure sensor design; stress sensitivity; Delay lines; Force; Sensitivity; Strain; Stress; Surface acoustic waves; Temperature sensors;
Conference_Titel :
Ultrasonics Symposium (IUS), 2013 IEEE International
Conference_Location :
Prague
Print_ISBN :
978-1-4673-5684-8
DOI :
10.1109/ULTSYM.2013.0547
