Title :
Fabrication of a MZI device based on waveguides of SiN for biological detection
Author :
Jimenez, Abimael P. ; Heredia, Aurelio ; Ambrosio, Roberto C. L. ; Moreno, Mario ; Martinez, Carlos
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. Autonoma de Ciudad Juarez, Ciudad Juárez, Mexico
Abstract :
In this work an integrated MZI configuration-based optical biosensor has been developed. This was obtained by PECVD with a waveguide of silicon nitride film. The silicon nitride film has similar properties to the films obtained with LPCVD. The device structure is simple and meets the requirements of a low temperature of fabrication for silicon technology, offering the possibility to have an integrated optical system. The results of the characterization of the device have showed that this could be important for future biological or chemical sensor.
Keywords :
Mach-Zehnder interferometers; biosensors; chemical sensors; optical planar waveguides; optical sensors; plasma CVD; silicon compounds; LPCVD; Mach-Zehnder interferometric configuration; PECVD; SiN; biological detection; chemical sensor; device structure; integrated MZI configuration; integrated optical devices; integrated optical system; optical biosensor; plasma enhanced chemical vapor deposition; silicon nitride film waveguide; Biomedical optical imaging; Optical device fabrication; Optical films; Optical interferometry; Optical sensors; Optical waveguides; Silicon;
Conference_Titel :
Semiconductor Device Research Symposium (ISDRS), 2011 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4577-1755-0
DOI :
10.1109/ISDRS.2011.6135374
