Fabrication of a MZI device based on waveguides of SiN for biological detection

Author

Jimenez, Abimael P. ; Heredia, Aurelio ; Ambrosio, Roberto C. L. ; Moreno, Mario ; Martinez, Carlos

Author_Institution

Electr. & Comput. Eng. Dept., Univ. Autonoma de Ciudad Juarez, Ciudad Juárez, Mexico

fYear

2011

fDate

7-9 Dec. 2011

Firstpage

1

Lastpage

2

Abstract

In this work an integrated MZI configuration-based optical biosensor has been developed. This was obtained by PECVD with a waveguide of silicon nitride film. The silicon nitride film has similar properties to the films obtained with LPCVD. The device structure is simple and meets the requirements of a low temperature of fabrication for silicon technology, offering the possibility to have an integrated optical system. The results of the characterization of the device have showed that this could be important for future biological or chemical sensor.

Keywords

Mach-Zehnder interferometers; biosensors; chemical sensors; optical planar waveguides; optical sensors; plasma CVD; silicon compounds; LPCVD; Mach-Zehnder interferometric configuration; PECVD; SiN; biological detection; chemical sensor; device structure; integrated MZI configuration; integrated optical devices; integrated optical system; optical biosensor; plasma enhanced chemical vapor deposition; silicon nitride film waveguide; Biomedical optical imaging; Optical device fabrication; Optical films; Optical interferometry; Optical sensors; Optical waveguides; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Device Research Symposium (ISDRS), 2011 International

Conference_Location

College Park, MD

Print_ISBN

978-1-4577-1755-0

Type

conf

DOI

10.1109/ISDRS.2011.6135374

Filename

6135374