High Q SAW resonator using upper-electrodes on grooved-electrodes in LiTaO3

Author

Kimura, Tomohiro ; Kadota, Mitsuhiro ; Ida, Yasutoshi

Author_Institution

Murata Manuf. Co., Ltd., Yasu, Japan

fYear

2010

fDate

23-28 May 2010

Firstpage

1

Lastpage

1

Abstract

Summary form only given. Al-electrodes on 36-48°YX-LiTaO3 substrates have been widely used in surface acoustic wave (SAW) filters and SAW duplexers because of having an optimum electro-mechanical coupling factor, reflection coefficient and good Q-factor. In this paper, authors proposed and constructed a new SAW structure composed of upper Al-electrodes accumulated on lower grooved Cu-electrodes in the LiTaO3 substrate, which has approximately same electro-mechanical coupling factor and reflection coefficient as the Al-electrodes (thickness of 0.1lambda)/36-48°YX-LiTaO3 in order to realize high Q-factor. As the result, the SAW resonator having superior Q-factor was realized compared with that of Al-electrodes(0.1lambda)/42°YX-LiTaO3 substrates.

Keywords

Q-factor; electromechanical effects; surface acoustic wave filters; surface acoustic wave resonators; LiTaO₃; Q-factor; SAW duplexers; grooved-electrodes; high Q SAW resonator; optimum electro-mechanical coupling factor; reflection coefficient; surface acoustic wave filters; upper-electrodes; Acoustic reflection; Acoustic waves; Multiplexing; Passive filters; Q factor; Resonator filters; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International

Conference_Location

Anaheim, CA

ISSN

0149-645X

Print_ISBN

978-1-4244-6056-4

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2010.5515548

Filename

5515548