Title :
Challenges and approaches of fabricating GaN-based green lasers
Author :
Sizov, Dmitry S. ; Bhat, Rajaram ; Zah, Chung-en
Author_Institution :
Semicond. Technol. Res., Sci. & Technol. Div., Corning Inc., Corning, NY, USA
Abstract :
In this paper we discuss the motivation, challenges, and progress in making group-III nitride lasers emitting in the green spectral range, and compare the devices created using epitaxial structures grown on GaN substrates with c-plane (i.e. plane with (0001) crystallographic orientation) and semipolar-plane (i.e. with the plane tilted from c-plane by >;0 and <;90 degree) orientations. The different structure design choices are discussed, taking into account specific material properties and crystal growth requirements for these orientations.
Keywords :
III-V semiconductors; gallium compounds; indium compounds; integrated optics; optical fabrication; quantum well lasers; wide band gap semiconductors; GaN; GaN substrates; GaN-based green lasers; InGaN; crystal growth; crystallographic orientation; epitaxial structures; group-III nitride lasers; semipolar-plane; structural design; Diode lasers; Green products; Optical polarization; Optical pumping; Pump lasers; Semiconductor lasers;
Conference_Titel :
Semiconductor Device Research Symposium (ISDRS), 2011 International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4577-1755-0
DOI :
10.1109/ISDRS.2011.6135409