DocumentCode
3102733
Title
A MEMS-based oscillator with synchronous amplitude control
Author
Gronicz, Jakub ; Chekurov, Nikolai ; Aaltonen, Lasse ; Halonen, Kari
Author_Institution
SMARAD2-Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland
fYear
2013
fDate
24-27 June 2013
Firstpage
117
Lastpage
120
Abstract
This paper describes the design and simulation of a MEMS-based oscillator with a silicon tuning fork as frequency selective element. The interface electronics include a synchronous amplitude control circuit that allows for precise control of oscillation amplitude. The nominal oscillation frequency is 1.8 MHz. The structure has been implemented using a 0.35 μm High Voltage CMOS process and operates with a nominal supply of 3.3V.
Keywords
CMOS integrated circuits; elemental semiconductors; micromechanical devices; oscillators; silicon; MEMS-based oscillator; Si; frequency 1.8 MHz; frequency selective element; high voltage CMOS process; interface electronics; oscillation amplitude; silicon tuning fork; size 0.35 mum; synchronous amplitude control circuit; voltage 3.3 V; Detectors; Electrodes; Micromechanical devices; Oscillators; Resonant frequency; Vibrations; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Ph.D. Research in Microelectronics and Electronics (PRIME), 2013 9th Conference on
Conference_Location
Villach
Print_ISBN
978-1-4673-4580-4
Type
conf
DOI
10.1109/PRIME.2013.6603129
Filename
6603129
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