Title :
Electrostatic surface drives: theoretical considerations and fabrication
Author :
Hoen, Storrs ; Merchant, Paul ; Koke, Gladys ; Williams, Judy
Author_Institution :
Hewlett-Packard Co., Palo Alto, CA, USA
Abstract :
Micromachined actuators with large travel, highly precise position control, and low actuation voltage are essential for atomic resolution storage, micro-optical stages, microwave devices, and control surfaces for a variety of sensors. We describe the characteristics and limitations of a novel electrostatic surface drive. A prototype, fabricated with two-level metallization, deep silicon etching, and a dry release process, has demonstrated 8 μm travel at 4 V applied bias
Keywords :
electric drives; electrostatic devices; etching; microactuators; micromachining; micromotors; semiconductor device metallisation; stators; 4 V; 8 micron; Si; atomic resolution storage; deep etching; dipole actuators; dry release process; electrostatic potentials; electrostatic surface drives; fabrication; highly precise position control; large travel; linear surface drives; low actuation voltage; micro-optical stages; micromachined actuators; sensor control surfaces; stator; two-level metallization; Actuators; Electrostatics; Low voltage; Metallization; Microwave devices; Microwave sensors; Position control; Prototypes; Sensor phenomena and characterization; Voltage control;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613576
