Title :
Silicon mirrors and micromirror arrays for spatial laser beam modulation
Author :
Dötzel, Wolfram ; Gessner, Thomas ; Hahn, Ramon ; Kaufmann, Christian ; Kehr, Kersten ; Kurth, Steffen ; Mehner, Jan
Author_Institution :
Tech. Univ. Chemnitz, Germany
Abstract :
This paper deals with design, technology and experimental investigations of mirrors and micromirror arrays made of monocrystalline silicon. Electrostatically operated twin-directional deflecting mirrors and mirror arrays convenient for continuous scanning with working frequencies between several 100 Hz up to 20 kHz will be presented. An experimental data based method to improve the accuracy of model parameters for simulations and to determine the cross coupling between array cells is new in the field of micromechanics and will be shown
Keywords :
elemental semiconductors; integrated optics; mirrors; silicon; spatial light modulators; 100 Hz to 20 kHz; Si; Si mirrors; array cells; continuous scanning; cross coupling; electrostatically operated twin-directional deflecting mirrors; micromechanics; micromirror arrays; mirror arrays; model parameters; monocrystalline silicon; spatial laser beam modulation; Actuators; Electrodes; Frequency; Laser beams; Micromirrors; Mirrors; Optical arrays; Optical modulation; Silicon; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613587
