Title :
5 kHz high repetition rate excimer laser
Author :
Takagi, Shinichi ; Kakizaki, Ken´ichi ; Okamoto, N. ; Endo, F. ; Ishikawa, Kenji ; Goto, Tetsu
Keywords :
Circuits; Cleaning; Corona; Electrodes; Gas lasers; Laser beams; Laser transitions; Mass production; Optical pulses; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.521315
