DocumentCode :
3105154
Title :
High sensitive micro touch sensor with piezoelectric thin film for micro pipetting works under microscope
Author :
Arai, Fumihito ; Motoo, Kouhei ; Fukuda, Toshio ; Katsuragi, Tohoru
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Volume :
2
fYear :
2004
fDate :
April 26-May 1, 2004
Firstpage :
1352
Abstract :
Isolation and separation of the target microbe is quite important. We propose a new touch sensor for separation of the target microbe on the plate using a micromanipulator with the glass pipette. Principle of this touch sensor is based on detection of mechanical impedance change after contact of the vibrating pipette tip with the plate. We improved the fixation method of the sensor with the pipette as well as electrode design of the sensor. We performed the FEM analysis to improve sensitivity of this sensor. The prototype sensor has high sensitivity and high rigidity and is excellent in durability. This sensor is sensitive enough to protect the fragile pipette tip from abrupt collision. Thus, separation task of the microbe by the micromanipulator under the microscope is improved.
Keywords :
finite element analysis; micromanipulators; microorganisms; microsensors; piezoelectric thin films; tactile sensors; FEM analysis; electrode design; finite element method; fixation method; fragile pipette tip; glass pipette; high sensitive micro touch sensor; mechanical impedance detection; micro pipetting; micromanipulators; piezoelectric thin film; prototype sensor; target microbe; vibrating pipette tip; Electrodes; Glass; Impedance; Mechanical sensors; Micromanipulators; Microscopy; Performance analysis; Piezoelectric films; Prototypes; Tactile sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Robotics and Automation, 2004. Proceedings. ICRA '04. 2004 IEEE International Conference on
ISSN :
1050-4729
Print_ISBN :
0-7803-8232-3
Type :
conf
DOI :
10.1109/ROBOT.2004.1308012
Filename :
1308012
Link To Document :
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