Title :
Micromachined sensors for static and dynamic shear-stress measurements in aerodynamic flows
Author :
Padmanabhan, A. ; Sheplak, M. ; Breuer, K.S. ; Schmidt, M.A.
Author_Institution :
Dept. of Aeronaut. & Astronaut., MIT, Cambridge, MA, USA
Abstract :
We present in this paper the design and test results of micromachined individual sensors and sensor arrays for shear stress measurements in air flows. The authors previously (1996) reported on the sensing principle and fabrication process. The floating-element sensors have since been extensively tested in laminar flows. Static calibrations have shown this sensor to have a maximum nonlinearity of 1% over four orders of wall shear stress (0.0014-10 Pa). In addition, for the first time, the dynamic response of this sensor has also been experimentally verified to 4 kHz. An improved sensing scheme has been developed and has been successfully implemented in a second generation of sensor arrays
Keywords :
aerodynamics; boundary layer turbulence; microsensors; shear flow; shear turbulence; stress measurement; 0.0014 to 10 Pa; 4 kHz; aerodynamic flows; air flows; dynamic shear-stress measurements; fabrication process; floating-element sensors; laminar flows; micromachined sensors; sensing principle; sensor arrays; static calibrations; static shear-stress measurements; wall shear stress; Aerodynamics; Calibration; Capacitive sensors; Extraterrestrial measurements; Photodiodes; Sensor arrays; Sensor phenomena and characterization; Silicon; Solid lasers; Stress measurement;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613601
