Title :
Short-Time Discrete Wavelet Transform for wafer microcrack detection
Author_Institution :
Dept. of Electr. Eng., Changhua Univ. of Educ., Changhua, Taiwan
Abstract :
This paper presents design and proof-of-principle experiments for a real-time in-line wafer microcrack detection system. The line-scanning method is chosen because entire wafer can be inspected without image processing technology. Short-Time Discrete Wavelet Transform (STDWT) is developed in order to determine reflective characteristics of microcrack, and smaller computation complexity in order to shorten system resolving time.
Keywords :
crack detection; discrete wavelet transforms; inspection; microcracks; computation complexity; in-line wafer microcrack detection; line-scanning method; reflective characteristics; short-time discrete wavelet transform; Continuous wavelet transforms; Discrete wavelet transforms; Inspection; Laser beams; Optical arrays; Photovoltaic cells; Photovoltaic systems; Silicon; Solar power generation; Stimulated emission;
Conference_Titel :
Industrial Electronics, 2009. ISIE 2009. IEEE International Symposium on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-4347-5
Electronic_ISBN :
978-1-4244-4349-9
DOI :
10.1109/ISIE.2009.5213600
