DocumentCode
310855
Title
Assessing Processing Induced Darnage Using Cyclic I-V Analysis
Author
Okandan, Murat ; Merritt, Mitch ; Fonash, Stephen
Author_Institution
The Pennsylvania State University
fYear
1997
fDate
13-14 May 1997
Firstpage
105
Lastpage
108
Keywords
Buildings; Charge carrier lifetime; Current measurement; Energy measurement; Interface states; Laboratories; Magnetic resonance imaging; Monitoring; Stress measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Process-Induced Damage, 1997., 2nd International Symposium on
Conference_Location
Monterey, California, USA
Print_ISBN
0-9651-5771-7
Type
conf
DOI
10.1109/PPID.1997.596708
Filename
596708
Link To Document