Title :
Assessing Processing Induced Darnage Using Cyclic I-V Analysis
Author :
Okandan, Murat ; Merritt, Mitch ; Fonash, Stephen
Author_Institution :
The Pennsylvania State University
Keywords :
Buildings; Charge carrier lifetime; Current measurement; Energy measurement; Interface states; Laboratories; Magnetic resonance imaging; Monitoring; Stress measurement; Voltage;
Conference_Titel :
Plasma Process-Induced Damage, 1997., 2nd International Symposium on
Conference_Location :
Monterey, California, USA
Print_ISBN :
0-9651-5771-7
DOI :
10.1109/PPID.1997.596708