• DocumentCode
    310855
  • Title

    Assessing Processing Induced Darnage Using Cyclic I-V Analysis

  • Author

    Okandan, Murat ; Merritt, Mitch ; Fonash, Stephen

  • Author_Institution
    The Pennsylvania State University
  • fYear
    1997
  • fDate
    13-14 May 1997
  • Firstpage
    105
  • Lastpage
    108
  • Keywords
    Buildings; Charge carrier lifetime; Current measurement; Energy measurement; Interface states; Laboratories; Magnetic resonance imaging; Monitoring; Stress measurement; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Process-Induced Damage, 1997., 2nd International Symposium on
  • Conference_Location
    Monterey, California, USA
  • Print_ISBN
    0-9651-5771-7
  • Type

    conf

  • DOI
    10.1109/PPID.1997.596708
  • Filename
    596708