Title :
3-D Confocal Laser Scanning Microscopy Based on a Full-MEMS Scanning System
Author :
Lin Liu ; Huikai Xie
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μm at only 3.2 V. The two-dimensional MEMS mirror can achieve ± 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μm, respectively.
Keywords :
biological tissues; biomedical optical imaging; brain; laser beam applications; micro-optomechanical devices; microlenses; micromirrors; optical microscopes; optical microscopy; optical scanners; 3-D confocal laser scanning microscopy; MEMS lens scanner; PDMS; acute rat brain tissue; axial resolutions; confocal microscope; full-MEMS scanning system; lateral resolutions; microparticles; three-dimensional confocal reflectance images; two-axis lateral scan; two-dimensional MEMS mirror; two-dimensional confocal reflectance images; voltage 3.2 V; voltage 4.5 V; 3-D scan; MEMS lens; MEMS mirror; confocal microscopy; thermal actuation;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2013.2267794
