Title :
A custom computing solution to automated visual inspection of silicon wafers
Author :
Athanas, Peter ; Abbot, L. ; Cherbaka, Mark ; Pudipeddi, Bharadwaj ; Paar, Kevin
Author_Institution :
Dept. of Electr. Eng., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA
Abstract :
This paper illustrates, through a specific example, the utility and effectiveness of using the reconfigurable capabilities of an FPGA-based custom computing platform as part of an industrial inspection system. The inspection task examined is typical of many industrial inspection tasks which require the identification of several different types of failures of products on a manufacturing assembly line. Like many inspection tasks, a number of features must be examined-each of which may require unique signal processing. A custom computing platform can provide the demanding signal processing performance while maintaining the capability of rapidly reconfiguring for an assortment of tasks
Keywords :
automatic optical inspection; automatic testing; field programmable gate arrays; image processing; integrated circuit manufacture; integrated circuit testing; silicon; FPGA based custom computing platform; Si; automated visual inspection; custom computing solution; industrial inspection system; manufacturing assembly line; product failure identification; reconfigurable capabilities; signal processing; silicon wafers; Computer industry; Electrical products industry; Engines; Field programmable gate arrays; Foundries; Image processing; Inspection; Manufacturing industries; Signal processing; Silicon;
Conference_Titel :
Southeastcon '97. Engineering new New Century., Proceedings. IEEE
Conference_Location :
Blacksburg, VA
Print_ISBN :
0-7803-3844-8
DOI :
10.1109/SECON.1997.598701