Atmospheric pressure transient micro glow discharge driven by burst pulse generator with nonlinear transmission line

Author

Ibuka, S. ; Furuya, F. ; Ogura, K. ; Yasuoka, K. ; Ishii, S.

Author_Institution

Tokyo Institute of Technology, Dept. of Electrical Electronic Eng., 2-12-1-S3-9, O-okayama, Meguro-ku, 152-8550, JAPAN

Volume

1

fYear

2007

fDate

17-22 June 2007

Firstpage

376

Lastpage

381

Abstract

High-power atmospheric glow discharges (APGDs) are widely used in various industrial applications. Transient glow microdischarges in ambient air also serve as a plasma source for microprocessing technology. In this study, we developed novel driving technique of the transient glow microdischarge with miniature helium gas flow powered by high-voltage pulse train. It was obtained by using the burst pulse generator with a nonlinear transmission line (NLTL), which consisted of chip monolithic ceramic capacitors as nonlinear elements. Repetitive burst pulses with an output voltage of 2.2 kV and a pulse width of 40 ns were generated. The equivalent frequency of the pulse train was 12.5 MHz. A stabilization effect of the highly repetitive operation on the discharge was confirmed regardless of a short residential time of a helium gas.

Keywords

Ceramics; Fluid flow; Glow discharges; Helium; Plasma sources; Power system transients; Power transmission lines; Pulse generation; Space vector pulse width modulation; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Pulsed Power Conference, 2007 16th IEEE International

Conference_Location

Albuquerque, NM

Print_ISBN

978-1-4244-0913-6

Electronic_ISBN

978-1-4244-0914-3

Type

conf

DOI

10.1109/PPPS.2007.4651862

Filename

4651862