DocumentCode :
3110790
Title :
Transient response analysis and FF/FB control with 0.05 micro meter resolution for 3-DOF inchworm mobile mechanism
Author :
Sato, Takashi ; Yatsurugi, Manabu ; Fuchiwaki, Ohmi
Author_Institution :
Dept. of Mech. Eng., YNU, Yokohama, Japan
fYear :
2012
fDate :
5-8 Aug. 2012
Firstpage :
174
Lastpage :
179
Abstract :
In this paper, we have reported that precise positioning control within one step motion with 0.05μm positioning resolution for a precise inchworm mobile mechanism. The mechanism is composed of 2 Y-shaped electromagnets and 6 piezoelectric actuators and moves like inchworm with synchronism of saw-tooth magnetic forces and sinusoidal displacements of the actuators. In previous report, we have reported that the mechanism moves straight in any direction with 80μm step width. We have also described that we can approximately calculate the displacements of 6 piezoelectric actuators with 3-DOF simple harmonic vibration model for getting coarse positioning of 3-DOF movements. However, we still need to control within 1 step motion for precise positioning with less than sub-micro meter resolution. In this paper, we describe ideal input voltage to the 6 actuators under the condition of no slip of supporting electromagnet. In experiments, we have checked that we can control the free leg within 0.3μm when positioning range is between 5 to 30μm under open loop condition. We have also checked that we can control the mechanism within 0.05μm within 0.05 second when we join ideal input voltage as feed forward control and PID closed-loop control as feedback. We also discuss about applications of bio-medical and nano science to open up flexible, high efficiency, and multi-function micromanipulation organized by this omnidirectional and holonomic mobile mechanisms.
Keywords :
closed loop systems; electromagnets; feedforward; magnetic forces; micrometry; mobile robots; motion control; open loop systems; piezoelectric actuators; position control; three-term control; transient response; 3DOF inchworm mobile mechanism; 3DOF simple harmonic vibration model; FB control; FF control; PID closed-loop control; Y-shaped electromagnets; biomedical science; coarse positioning; feed forward control; holonomic mobile mechanism; ideal input voltage; multifunction micromanipulation; nano science; omnidirectional mechanism; open loop condition; piezoelectric actuators; positioning range; positioning resolution; precise positioning control; saw-tooth magnetic forces; sinusoidal displacements; step motion; submicro meter resolution; supporting electromagnet; transient response analysis; Automation; Conferences; Mechatronics; FF/FB control; inchworm; piezoelectric actuator;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Mechatronics and Automation (ICMA), 2012 International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4673-1275-2
Type :
conf
DOI :
10.1109/ICMA.2012.6282837
Filename :
6282837
Link To Document :
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