Electrical microchannel silicon sensor for solvent detection

Author

Parashchenko, Maksim A. ; Vandisheva, Natalia V. ; Kirienko, Victor V. ; Filippov, Nikolay S. ; Romanov, Sergey I.

Author_Institution

A.V. Rzhanov Inst. of Semicond. Phys., SB RAS, Novosibirsk, Russia

fYear

2011

fDate

June 30 2011-July 4 2011

Firstpage

150

Lastpage

151

Abstract

This paper has been devoted to creation of the sensor based on ordered microchannel silicon resistor for electrophysical detection of liquids. Interactions of sensor with organic and inorganic liquids (acetic acid, ammonium hydroxide, ethyl alcohol, water-alcohol solution and deionized water) were studied by high frequency conductance measurements. It was established that the sensor had specific response for each liquid. It was shown that the proposed electrophysical method allowed identifying the liquid interacted with the sensor.

Keywords

chemical sensors; elemental semiconductors; microsensors; silicon; acetic acid; ammonium hydroxide; deionized water; electrical microchannel sensor; electrophysical detection; electrophysical method; ethyl alcohol; frequency conductance measurements; inorganic liquids; microchannel resistor; solvent detection; water-alcohol solution; Biology; Conductivity; Liquids; Microchannel; Sensors; Silicon; Temperature measurement; Porous silicon; microchannel silicon sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on

Conference_Location

Erlagol, Altai

Print_ISBN

978-1-61284-793-1

Type

conf

DOI

10.1109/EDM.2011.6006919

Filename

6006919