Title :
Electrical microchannel silicon sensor for solvent detection
Author :
Parashchenko, Maksim A. ; Vandisheva, Natalia V. ; Kirienko, Victor V. ; Filippov, Nikolay S. ; Romanov, Sergey I.
Author_Institution :
A.V. Rzhanov Inst. of Semicond. Phys., SB RAS, Novosibirsk, Russia
fDate :
June 30 2011-July 4 2011
Abstract :
This paper has been devoted to creation of the sensor based on ordered microchannel silicon resistor for electrophysical detection of liquids. Interactions of sensor with organic and inorganic liquids (acetic acid, ammonium hydroxide, ethyl alcohol, water-alcohol solution and deionized water) were studied by high frequency conductance measurements. It was established that the sensor had specific response for each liquid. It was shown that the proposed electrophysical method allowed identifying the liquid interacted with the sensor.
Keywords :
chemical sensors; elemental semiconductors; microsensors; silicon; acetic acid; ammonium hydroxide; deionized water; electrical microchannel sensor; electrophysical detection; electrophysical method; ethyl alcohol; frequency conductance measurements; inorganic liquids; microchannel resistor; solvent detection; water-alcohol solution; Biology; Conductivity; Liquids; Microchannel; Sensors; Silicon; Temperature measurement; Porous silicon; microchannel silicon sensor;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-61284-793-1
DOI :
10.1109/EDM.2011.6006919
