Title :
High repetition rate pulsed power generator for extreme ultraviolet light source
Author :
Sakugawa, T. ; Nagano, K. ; Kondo, Y. ; Namihira, T. ; Katsuki, S. ; Akiyama, H.
Author_Institution :
Graduate School of Science and Technology, Kumamoto University, Kurokami 2-39-1, 860-8555, Japan
Abstract :
Recently, all solid-state pulsed power generators, which are operated with high repetition rate, long lifetime and high reliability, have been developed for industrial applications, such as high repetition rate pulsed gas lasers, discharges plasma in water and high energy density plasma for extreme ultraviolet (EUV) light sources.
Keywords :
Gas industry; Light sources; Optical pulse generation; Plasma applications; Plasma density; Plasma sources; Power generation; Pulse generation; Solid state circuits; Ultraviolet sources;
Conference_Titel :
Pulsed Power Conference, 2007 16th IEEE International
Conference_Location :
Albuquerque, NM
Print_ISBN :
978-1-4244-0913-6
Electronic_ISBN :
978-1-4244-0914-3
DOI :
10.1109/PPPS.2007.4651937
