• DocumentCode
    3111731
  • Title

    High repetition rate pulsed power generator for extreme ultraviolet light source

  • Author

    Sakugawa, T. ; Nagano, K. ; Kondo, Y. ; Namihira, T. ; Katsuki, S. ; Akiyama, H.

  • Author_Institution
    Graduate School of Science and Technology, Kumamoto University, Kurokami 2-39-1, 860-8555, Japan
  • Volume
    1
  • fYear
    2007
  • fDate
    17-22 June 2007
  • Firstpage
    702
  • Lastpage
    705
  • Abstract
    Recently, all solid-state pulsed power generators, which are operated with high repetition rate, long lifetime and high reliability, have been developed for industrial applications, such as high repetition rate pulsed gas lasers, discharges plasma in water and high energy density plasma for extreme ultraviolet (EUV) light sources.
  • Keywords
    Gas industry; Light sources; Optical pulse generation; Plasma applications; Plasma density; Plasma sources; Power generation; Pulse generation; Solid state circuits; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Pulsed Power Conference, 2007 16th IEEE International
  • Conference_Location
    Albuquerque, NM
  • Print_ISBN
    978-1-4244-0913-6
  • Electronic_ISBN
    978-1-4244-0914-3
  • Type

    conf

  • DOI
    10.1109/PPPS.2007.4651937
  • Filename
    4651937
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3111731