DocumentCode
3111866
Title
Intrinsically switchable interdigitated barium titanate thin film contour mode resonators
Author
Lee, V.C. ; Sis, Seyit Ahmet ; Zhu, Xinen ; Mortazawi, Amir
Author_Institution
University of Michigan, Ann Arbor, United States
fYear
2010
fDate
23-28 May 2010
Firstpage
1
Lastpage
1
Abstract
This paper presents the design and measurement results of an intrinsically switchable interdigitated contour mode resonator based on barium titanate (BTO) thin films. The device exhibits quality factors of 178 and 152 at series and parallel resonance frequencies of 1.67 and 1.68 GHz, respectively, with the application of a 10 V dc bias. Resonances are turned off without the application of dc bias. This is the first demonstration of an intrinsically switchable interdigitated ferroelectric contour mode resonator.
Keywords
Acoustic devices; Barium; Ferroelectric materials; Q factor; Resonance; Resonant frequency; Thin film devices; Time measurement; Titanium compounds; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International
Conference_Location
Anaheim, CA
ISSN
0149-645X
Print_ISBN
978-1-4244-6056-4
Electronic_ISBN
0149-645X
Type
conf
DOI
10.1109/MWSYM.2010.5516009
Filename
5516009
Link To Document