Title :
Intrinsically switchable interdigitated barium titanate thin film contour mode resonators
Author :
Lee, V.C. ; Sis, Seyit Ahmet ; Zhu, Xinen ; Mortazawi, Amir
Author_Institution :
University of Michigan, Ann Arbor, United States
Abstract :
This paper presents the design and measurement results of an intrinsically switchable interdigitated contour mode resonator based on barium titanate (BTO) thin films. The device exhibits quality factors of 178 and 152 at series and parallel resonance frequencies of 1.67 and 1.68 GHz, respectively, with the application of a 10 V dc bias. Resonances are turned off without the application of dc bias. This is the first demonstration of an intrinsically switchable interdigitated ferroelectric contour mode resonator.
Keywords :
Acoustic devices; Barium; Ferroelectric materials; Q factor; Resonance; Resonant frequency; Thin film devices; Time measurement; Titanium compounds; Transistors;
Conference_Titel :
Microwave Symposium Digest (MTT), 2010 IEEE MTT-S International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4244-6056-4
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2010.5516009
