• DocumentCode
    3111867
  • Title

    Simulation of an atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon (DLC) film deposition

  • Author

    Farouk, T. ; Farouk, B. ; Gutsol, A. ; Fridman, A.

  • Author_Institution
    Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, USA
  • Volume
    1
  • fYear
    2007
  • fDate
    17-22 June 2007
  • Firstpage
    728
  • Lastpage
    731
  • Abstract
    A hybrid model has been developed to simulate atmospheric pressure methane-hydrogen micro-discharge for diamond like carbon deposition. The simulation predicts CH2, CH3 and C2H2 as the predominant growth species for diamond like carbon deposition. A strong dependence of soot formation on gas temperature is observed. The results further indicates that the quality of the deposited film have strong dependence on discharge current.
  • Keywords
    Atmospheric modeling; Atmospheric-pressure plasmas; Diamond-like carbon; Electron mobility; Glow discharges; Plasma applications; Plasma chemistry; Plasma simulation; Plasma sources; Plasma temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Pulsed Power Conference, 2007 16th IEEE International
  • Conference_Location
    Albuquerque, NM
  • Print_ISBN
    978-1-4244-0913-6
  • Electronic_ISBN
    978-1-4244-0914-3
  • Type

    conf

  • DOI
    10.1109/PPPS.2007.4651943
  • Filename
    4651943
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3111867