• DocumentCode
    3112067
  • Title

    Micromechanical IR-systems

  • Author

    Kuryshev, Georgy L.

  • Author_Institution
    A.V. Rzhanov Inst. of Semicond. Phys., SB RAS, Novosibirsk, Russia
  • fYear
    2011
  • fDate
    June 30 2011-July 4 2011
  • Firstpage
    327
  • Lastpage
    329
  • Abstract
    The results of experimental investigation of the membrane matrix mikrofotoconvectors, operation of which is based on the mechanical movement of the membrane plane are presented. The possibility of thermal radiation registration by optical methods in the visible spectrum was shown.
  • Keywords
    matrix convertors; micro-optomechanical devices; membrane matrix mikrofotoconvectors; membrane plane; micromechanical IR-systems; optical methods; thermal radiation registration; visible spectrum; Metals; Optical films; Optical imaging; Optical sensors; Production; Substrates; Infrared; hybrid; membrane;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on
  • Conference_Location
    Erlagol, Altai
  • Print_ISBN
    978-1-61284-793-1
  • Type

    conf

  • DOI
    10.1109/EDM.2011.6006938
  • Filename
    6006938
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3112067