• DocumentCode
    3112078
  • Title

    Scanning infrared microscope

  • Author

    Mzhelskiy, Ivan V. ; Polovinkin, Vladimir G.

  • Author_Institution
    Inst. of Semicond. Phys., Russian Acad. of Sci., Novosibirsk, Russia
  • fYear
    2011
  • fDate
    June 30 2011-July 4 2011
  • Firstpage
    330
  • Lastpage
    332
  • Abstract
    Scanning infrared microscope (SIRM) based on InAs matrix or InSb line photo detector is described.
  • Keywords
    III-V semiconductors; indium compounds; optical microscopes; photodetectors; InAs; InAs matrix; InSb; InSb line photodetector; scanning infrared microscope; Detectors; Light emitting diodes; Optical microscopy; Physics; Scanning electron microscopy; Software; Infrared; SIRM; microscope;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on
  • Conference_Location
    Erlagol, Altai
  • Print_ISBN
    978-1-61284-793-1
  • Type

    conf

  • DOI
    10.1109/EDM.2011.6006939
  • Filename
    6006939
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3112078