DocumentCode
3112122
Title
Imprinting of thermo-optic polymer-waveguide Mach-Zehnder interferometer with bottom-up electric heating
Author
Lor, K.P. ; Chiang, K.S. ; Liu, Q. ; Chan, H.P.
Author_Institution
Dept. of Electron. Eng., City Univ. of Hong Kong, Kowloon, China
fYear
2009
fDate
13-17 July 2009
Firstpage
1
Lastpage
2
Abstract
We demonstrate a new approach of fabricating a thermo-optic polymer-waveguide Mach-Zehnder interferometer (MZI). The MZI is fabricated with an imprinting technique, where the electrode heater is formed at the bottom of the waveguide substrate.
Keywords
Mach-Zehnder interferometers; electric heating; optical waveguides; thermo-optical devices; bottom-up electric heating; electrode heater; imprinting technique; thermo-optic polymer-waveguide Mach-Zehnder interferometer; Dielectric substrates; Electrodes; Etching; Lithography; Optical attenuators; Optical polymers; Optical waveguides; Resistance heating; Silicon; Thermooptical devices;
fLanguage
English
Publisher
ieee
Conference_Titel
OptoElectronics and Communications Conference, 2009. OECC 2009. 14th
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-4102-0
Electronic_ISBN
978-1-4244-4103-7
Type
conf
DOI
10.1109/OECC.2009.5214416
Filename
5214416
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