Title :
Section I: Surface, films, layers
fDate :
June 30 2011-July 4 2011
Abstract :
Start of the above-titled section of the conference proceedings record.
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2011 International Conference and Seminar of Young Specialists on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-1-61284-793-1
DOI :
10.1109/EDM.2011.6006951
