Title :
Digital optical microscopy using the MR-CSI method
Author :
Van Den Berg, Peter M. ; Abubakar, Aria
Author_Institution :
Fac. of Appl. Sci., Delft Univ. of Technol., Delft, Netherlands
Abstract :
Optical Imaging of the permittivity profile from optical diffraction tomography data is discussed. In order to arrive at sub-100 nm resolution it is necessary to employ nonlinear inversion methods that yield quantitative information of the permittivity distribution. Therefore, the so-called multiplicative regularized contrast source inversion (MR-CSI) method is adopted to solve the problem at hand. For a two-dimensional representative example, it is demonstrated that, using a wavelength of 400 nm, resolutions of the order of 20 to 30 nm can be achieved.
Keywords :
image resolution; light diffraction; optical images; optical microscopy; optical tomography; permittivity; MR-CSI Method; digital optical microscopy; multiplicative regularized contrast source inversion method; nonlinear inversion methods; optical diffraction tomography data; optical imaging; permittivity distribution; permittivity profile; quantitative information; two dimensional representative; Equations; Gradient methods; Image resolution; Optical diffraction; Optical imaging; Permittivity; Scattering;
Conference_Titel :
Electromagnetic Theory (EMTS), 2010 URSI International Symposium on
Conference_Location :
Berlin
Print_ISBN :
978-1-4244-5155-5
Electronic_ISBN :
978-1-4244-5154-8
DOI :
10.1109/URSI-EMTS.2010.5637137