Title :
Micromotor assembly using high accurate optical vision feedback for microrobot relative 3D displacement in submicron range
Author :
Sulzmann, A. ; Breguet, J.-M. ; Jacot, J.
Author_Institution :
Dept. of Microeng., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
Abstract :
Our project is to develop a high precision tracking system to guide the newly developed microrobot during a microassembly task. Due to the working space of the Cl-robot, it has been necessary to develop new techniques to cope with manipulation of microsystems, visualization, simulation and positioning in general as also described in this article. A micro robot capable of manipulating micro systems and micro structures with a resolution higher than 10 nm and a vision feedback allowing a sub micron absolute, and nanometric relative positioning has been successfully developed and tested. A LIGA-micromotor has been successfully assembled
Keywords :
manipulators; micromotors; position control; robot vision; Cl-robot; LIGA-micromotor; calibration; high precision tracking; microassembly; micromotor assembly; microrobot; microsystems; nanometric relative positioning; optical vision feedback; positioning; relative 3D displacement; simulation; submicron absolute positioning; submicron range; vision feedback; visualization; Etching; Feedback loop; Grippers; Micromotors; Microscopy; Optical feedback; Position measurement; Robot vision systems; Robotic assembly; Space technology;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613638
