DocumentCode :
3113332
Title :
45° micromirror embedded in a single-mode waveguide fabricated by using liquid immersion exposure
Author :
Kintaka, Kenji ; Nishii, Junji ; Muranishi, Tomoyuki ; Shimizu, Katsuya ; Inoue, Junichi ; Nishio, Kenzo ; Ura, Shogo
Author_Institution :
Photonics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
fYear :
2009
fDate :
13-17 July 2009
Firstpage :
1
Lastpage :
2
Abstract :
A 45-degree micromirror was fabricated in a SiO2-based single-mode waveguide by using liquid immersion exposure for the first time. Both output coupling and input coupling between a guided wave and a free-space wave were demonstrated experimentally.
Keywords :
integrated optics; micromirrors; free-space wave; guided wave; liquid immersion exposure; micromirror; single-mode waveguide; Liquid waveguides; Micromirrors; Mirrors; Optical device fabrication; Optical interconnections; Optical surface waves; Optical waveguides; Resists; Surface emitting lasers; Vertical cavity surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
OptoElectronics and Communications Conference, 2009. OECC 2009. 14th
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-4102-0
Electronic_ISBN :
978-1-4244-4103-7
Type :
conf
DOI :
10.1109/OECC.2009.5214509
Filename :
5214509
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3113332
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