• DocumentCode
    3113332
  • Title

    45° micromirror embedded in a single-mode waveguide fabricated by using liquid immersion exposure

  • Author

    Kintaka, Kenji ; Nishii, Junji ; Muranishi, Tomoyuki ; Shimizu, Katsuya ; Inoue, Junichi ; Nishio, Kenzo ; Ura, Shogo

  • Author_Institution
    Photonics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
  • fYear
    2009
  • fDate
    13-17 July 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A 45-degree micromirror was fabricated in a SiO2-based single-mode waveguide by using liquid immersion exposure for the first time. Both output coupling and input coupling between a guided wave and a free-space wave were demonstrated experimentally.
  • Keywords
    integrated optics; micromirrors; free-space wave; guided wave; liquid immersion exposure; micromirror; single-mode waveguide; Liquid waveguides; Micromirrors; Mirrors; Optical device fabrication; Optical interconnections; Optical surface waves; Optical waveguides; Resists; Surface emitting lasers; Vertical cavity surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    OptoElectronics and Communications Conference, 2009. OECC 2009. 14th
  • Conference_Location
    Hong Kong
  • Print_ISBN
    978-1-4244-4102-0
  • Electronic_ISBN
    978-1-4244-4103-7
  • Type

    conf

  • DOI
    10.1109/OECC.2009.5214509
  • Filename
    5214509
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3113332