Analytical modeling of mass-sensitive gas sensor based on MEMS resonator

Author

Ahmed, Abdelaziz Yousif ; Dennis, John Ojur ; Khir, M. Haris M ; Saad, Mohamad Naufal Mohamad

Author_Institution

Dept. of Electr. & Electron. Eng., Univ. Teknol. PETRONAS, Tronoh, Malaysia

fYear

2011

fDate

19-20 Sept. 2011

Firstpage

1

Lastpage

3

Abstract

Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator. The theoretical resonant frequency is found to be 20.1 kHz. The change in the resonant frequency Δf = 0.13 Hz when the mass changes by Δm =43.2 fg on the resonator platform. The sensitivity is theoretical calculated to be0.3 Hz/pg.

Keywords

adsorption; cantilevers; gas sensors; mass measurement; micromachining; micromechanical resonators; microsensors; active material; analytical modeling; gas detection; mass-sensitive gas sensor; microcantilever; micromachined MEMS resonator; resonant frequency; surface adsorption; Acoustic beams; Chemicals; Micromechanical devices; Resonant frequency; Sensitivity; Sensors; Springs; Analytical modeling and MEMS; Microcantilever sensors; Natural frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

National Postgraduate Conference (NPC), 2011

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4577-1882-3

Type

conf

DOI

10.1109/NatPC.2011.6136422

Filename

6136422