Title :
Energy accuracy and control method of the NV-GSD-HE
Author :
Suetsugu, Noriyuki ; Kariya, Hiroyuki ; Kabasawa, Mitsuaki ; Sugitani, Michiro
Author_Institution :
Sumitomo Eaton Nova Corp., Ehime, Japan
Abstract :
The NV-GSD-HE is a high energy ion implanter which has a RF linac acceleration system. The RF acceleration system has many advantages to electro-static acceleration systems in order to obtain high energy ion beams. However, the beam energy from the RF system cannot be determined so easily as the electro-static systems which can determine the beam energy only from voltage(s) supplied to acceleration columns. On the NV-GSD-HE, the Final Energy Magnet is used for energy analysis, measuring its magnetic field strength by a Hall-probe. In order to determine the beam energy by this method, there are some assumptions and the error of each assumption was not so clear. Consequently the final accuracy of beam energy of the NV-GSD-HE was not so clearly defined. At the same time a control method of the accuracy was not found. In this study, each component of error is investigated and the total accuracy of energy is estimated. Additionally, a method of controlling accuracy is proposed
Keywords :
accelerator RF systems; calibration; ion accelerators; ion implantation; linear accelerators; Hall-probe; NV-GSD-HE; RF linac acceleration system; beam energy; calibration; control method; energy accuracy; energy analysis; final energy magnet; high energy ion implanter; magnetic field strength; Acceleration; Accelerometers; Energy measurement; Extraterrestrial measurements; Helium; Magnetic field measurement; Magnetic separation; Particle beams; Radio frequency; Voltage;
Conference_Titel :
Ion Implantation Technology, 2000. Conference on
Conference_Location :
Alpbach
Print_ISBN :
0-7803-6462-7
DOI :
10.1109/.2000.924184
