Robust actuator with micro-hydraulic lever principle

Fast and precise actuators for the millimeter range are increasingly used in a range of applications from semiconductor manufacturing to internal combustion machines. A widely deployed class of such actuators use piezoelectric multilayer stacks due to their high actuation strength and fast movement. Traditionally, the piezo stacks are combined with a mechanical lever to amplify the actuation range. This paper analyzes how robustness and reliability of such an actuator can be improved by replacing the mechanical lever by a fluidic, micro-hydraulic lever.