Title :
A novel two axis actuator for high speed large angular rotation
Author :
Dhuler, Vijay R. ; Walters, Mark ; Mahadevan, Ramaswamy ; Cowen, Allen B. ; Markus, Karen W.
Author_Institution :
MCNC, NC, USA
Abstract :
Reports the development of a novel two axis rotary actuator capable of high frequency out-of-plane rotation in two fully independent axes with large angular excursions. Initial results indicate that using the novel suspension and actuation mechanism presented permits large rotations exceeding ±13.5 degrees at rotational speeds exceeding 15 kHz, using excitation voltages below 100 V. The device is fabricated using a combination of surface and bulk micromachining. In this work the actuators are used to rotate single crystal silicon plates of sizes up to 1 mm2. The size of such a device is less than 4 mm2 making it suitable for a variety of new applications, such as micropositioning systems, inertial systems, microoptical elements, and compact imaging systems
Keywords :
microactuators; micromachining; mirrors; optical elements; optical scanners; optical workshop techniques; physical instrumentation control; position control; silicon-on-insulator; 1 mm; 100 V; 15 kHz; 4 mm; Si; actuation mechanism; bulk micromachining; compact imaging systems; excitation voltages; high frequency out-of-plane rotation; high speed large angular rotation; inertial systems; large angular excursions; large rotations; microoptical elements; micropositioning systems; rotational speeds; single crystal silicon plates; surface micromachining; suspension mechanism; two axis actuator; two axis rotary actuator; Boron; Control systems; Electrodes; Electrostatic actuators; Motion control; Optical control; Optical sensors; Pneumatic actuators; Silicon; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613650