Automated assembly of flip-up micromirrors

Author

Reid, J. Robert ; Bright, Victor M. ; Comtois, J.H.

Author_Institution

Rome Air Dev. Center, Hanscom AFB, MA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

347

Abstract

A microelectromechanical system for the automated assembly of flip-up micro-structures has been designed and fabricated. The system consists of a vertical thermal actuator, a linear assembly micromotor, and a self-engaging locking mechanism. The vertical thermal actuator is used to lift one end of the plate off of the substrate. This provides the linear assembly micromotor the leverage needed to push the plate up into a position where the self engaging locking mechanism secures the plate. The automated assembly system is demonstrated with a scanning micromirror and a corner cube reflector

Keywords

microactuators; microassembling; micromotors; mirrors; optical design techniques; optical fabrication; optical scanners; optical workshop techniques; physical instrumentation control; automated assembly; corner cube reflector; flip-up micro-structures; flip-up micromirrors; leverage; linear assembly micromotor; microelectromechanical system; scanning micromirror; self-engaging locking mechanism; substrate; vertical thermal actuator; Assembly systems; Automatic control; Control systems; Drives; Fabrication; Fasteners; Hydraulic actuators; Laboratories; Micromirrors; Micromotors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613655

Filename

613655