Title :
Automated assembly of flip-up micromirrors
Author :
Reid, J. Robert ; Bright, Victor M. ; Comtois, J.H.
Author_Institution :
Rome Air Dev. Center, Hanscom AFB, MA, USA
Abstract :
A microelectromechanical system for the automated assembly of flip-up micro-structures has been designed and fabricated. The system consists of a vertical thermal actuator, a linear assembly micromotor, and a self-engaging locking mechanism. The vertical thermal actuator is used to lift one end of the plate off of the substrate. This provides the linear assembly micromotor the leverage needed to push the plate up into a position where the self engaging locking mechanism secures the plate. The automated assembly system is demonstrated with a scanning micromirror and a corner cube reflector
Keywords :
microactuators; microassembling; micromotors; mirrors; optical design techniques; optical fabrication; optical scanners; optical workshop techniques; physical instrumentation control; automated assembly; corner cube reflector; flip-up micro-structures; flip-up micromirrors; leverage; linear assembly micromotor; microelectromechanical system; scanning micromirror; self-engaging locking mechanism; substrate; vertical thermal actuator; Assembly systems; Automatic control; Control systems; Drives; Fabrication; Fasteners; Hydraulic actuators; Laboratories; Micromirrors; Micromotors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613655
