DocumentCode
3115485
Title
The selfpriming VAMP
Author
Stehr, M. ; Gruhler, H. ; Straatmann, H. ; Messner, S. ; Sandmaier, H. ; Zengerle, R.
Author_Institution
HSG-IMIT, Villingen-Schwenningen, Germany
Volume
1
fYear
1997
fDate
16-19 Jun 1997
Firstpage
351
Abstract
The VAMP is a miniaturized device which is both, an active microvalve and a forward and reverse working micropump (VAMP = V alve A nd M icroP ump). Operating in the valve mode, the device enables fluid to flow or blocks it. Operating in the pump mode, fluids can be pumped in both directions. The pump direction can be controlled by the driving frequency of the actuator. After recent optimization of the geometry and especially after optimization of the pump chamber height, we now achieved selfpriming of the VAMP with liquids. The VAMP has been manufactured in a small-lot production and is available for industrial evaluation
Keywords
elemental semiconductors; micropumps; piezoelectric actuators; silicon; valves; Si; active microvalve; industrial evaluation; micropump; pump chamber height; pump direction; selfpriming VAMP; small-lot production; Actuators; Fluid flow control; Frequency; Geometry; Liquids; Manufacturing; Micropumps; Microvalves; Pumps; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613656
Filename
613656
Link To Document