Title :
Fabrication and experiment of planar micro ion drag pump
Author :
Ahn, Si Hong ; Kim, Yong Kweon
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
A micro ion drag pump with planar electrodes on a glass substrate was fabricated and tested. The pump consisted of a 2-dimensional electrode pair array driven by DC voltage using unipolar conduction. Ethyl alcohol was pumped in both directions, and the flow rate and the pressure were measured, in channels of depth 100 μm or 200 μm and width fixed at 3 mm. It was found that the pump could be fabricated easily and at lower cost than the micro ion drag pumps previously investigated
Keywords :
electrohydraulic control equipment; microelectrodes; micromachining; micropumps; 100 mum; 2-dimensional electrode pair array; 200 mum; 3 mm; DC voltage; cost; ethyl alcohol; fabrication; flow rate; glass substrate; planar electrodes; planar micro ion drag pump; pressure; unipolar conduction; Drag; Electrodes; Fabrication; Fluid flow measurement; Glass; Permittivity; Pumps; Testing; Viscosity; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613662
