DocumentCode
3115611
Title
Hall devices for magnetic sensor microsystems
Author
Popovic, R.S.
Author_Institution
Swiss Federal Inst. of Technol., Lausanne, Switzerland
Volume
1
fYear
1997
fDate
16-19 Jun 1997
Firstpage
377
Abstract
Typically, a magnetic sensor microsystem is a combination of a Hall device, some electronics, and ferromagnetic components. Usually, the Hall device has the form of a plate buried into the chip surface. Non conventional forms include: a vertical Hall device, sensitive to a magnetic field parallel with the chip surface; and a cylindrical Hall device, optimized to sense the circular magnetic field around a current carrying wire. Using a merged combination of two vertical Hall devices, a simple angular position sensor was made. A combination of vertical and horizontal devices gives a high accuracy 3D Hall probe
Keywords
Hall effect devices; magnetic devices; microsensors; 3D Hall probe; Hall device; angular position sensor; circular magnetic field; current carrying wire; cylindrical Hall device; ferromagnetic components; horizontal devices; magnetic sensor microsystems; vertical Hall device; Coils; Geometry; Hall effect devices; Magnetic circuits; Magnetic devices; Magnetic fields; Magnetic sensors; Permanent magnets; Signal processing; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613663
Filename
613663
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