DocumentCode
3115803
Title
System-level model of electrothermal microsystem with temperature control circuit
Author
Bechtold, T. ; Rudnyi, E.B. ; Hohlfeld, D.
Author_Institution
CADFEM GmbH, Leinfelden-Echterdingen, Germany
fYear
2011
fDate
18-20 April 2011
Firstpage
42374
Lastpage
42495
Abstract
In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.
Keywords
PI control; micromechanical devices; reduced order systems; temperature control; PI controller; electrothermal MEMS; electrothermal microsystem; micro hotplate; reduced order model; system-level model; temperature control circuit; Equations; Finite element methods; Heating; Mathematical model; Optimization; Resistors; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on
Conference_Location
Linz
Print_ISBN
978-1-4577-0107-8
Type
conf
DOI
10.1109/ESIME.2011.5765756
Filename
5765756
Link To Document