DocumentCode
3116
Title
A Nanometric Displacement Measurement System Using Differential Optical Feedback Interferometry
Author
Azcona, Francisco J. ; Atashkhooei, Reza ; Royo, Santiago ; Mendez Astudillo, Jorge ; Jha, Abhishek
Author_Institution
Centre for Sensors, Tech. Univ. of Catalonia, Terrassa, Spain
Volume
25
Issue
21
fYear
2013
fDate
Nov.1, 2013
Firstpage
2074
Lastpage
2077
Abstract
We propose differential optical feedback interferometry, a technique able to measure nanometer-size amplitude displacements by comparing the optical power of two lasers subject to optical feedback. In this letter, the principles of the technique are explained in detail, and its limits are explored by simulation. Theoretical results are presented showing that the technique can measure nanometer scale displacements with resolution within the angstrom scale. An experimental setup for validation has been built, and a series of experimental tests were performed using a capacitive sensor as a reference. Results show good agreement between theory and experiment with a reasonable reduction in performance due to mechanical coupling and signal noise. The proposed technique, thus, provides measurements of a very high resolution using an extremely simple and robust experimental setup.
Keywords
capacitive sensors; displacement measurement; light interferometry; measurement by laser beam; nanotechnology; optical feedback; capacitive sensor; differential optical feedback interferometry; laser optical output power; mechanical coupling; nanometer-size amplitude displacements; nanometric displacement measurement system; signal noise; Displacement measurement; Frequency measurement; Laser feedback; Measurement by laser beam; Optical feedback; Optical interferometry; Signal resolution; Laser sensors; nanodisplacement sensing; optical feedback interferometry; optical metrology;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/LPT.2013.2281269
Filename
6595025
Link To Document