• DocumentCode
    3116
  • Title

    A Nanometric Displacement Measurement System Using Differential Optical Feedback Interferometry

  • Author

    Azcona, Francisco J. ; Atashkhooei, Reza ; Royo, Santiago ; Mendez Astudillo, Jorge ; Jha, Abhishek

  • Author_Institution
    Centre for Sensors, Tech. Univ. of Catalonia, Terrassa, Spain
  • Volume
    25
  • Issue
    21
  • fYear
    2013
  • fDate
    Nov.1, 2013
  • Firstpage
    2074
  • Lastpage
    2077
  • Abstract
    We propose differential optical feedback interferometry, a technique able to measure nanometer-size amplitude displacements by comparing the optical power of two lasers subject to optical feedback. In this letter, the principles of the technique are explained in detail, and its limits are explored by simulation. Theoretical results are presented showing that the technique can measure nanometer scale displacements with resolution within the angstrom scale. An experimental setup for validation has been built, and a series of experimental tests were performed using a capacitive sensor as a reference. Results show good agreement between theory and experiment with a reasonable reduction in performance due to mechanical coupling and signal noise. The proposed technique, thus, provides measurements of a very high resolution using an extremely simple and robust experimental setup.
  • Keywords
    capacitive sensors; displacement measurement; light interferometry; measurement by laser beam; nanotechnology; optical feedback; capacitive sensor; differential optical feedback interferometry; laser optical output power; mechanical coupling; nanometer-size amplitude displacements; nanometric displacement measurement system; signal noise; Displacement measurement; Frequency measurement; Laser feedback; Measurement by laser beam; Optical feedback; Optical interferometry; Signal resolution; Laser sensors; nanodisplacement sensing; optical feedback interferometry; optical metrology;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2013.2281269
  • Filename
    6595025