Title :
Implantation mode dependence of damage structure depth profiles in Al2O3 irradiated with triple beam of H, He and heavy ions
Author :
Katano, Y. ; Aruga, T. ; Yamamoto, S. ; Nakazawa, T. ; Yamaki, D.
Author_Institution :
Dept. of Mater. Sci., JAERI, Ibaraki, Japan
Abstract :
The damage structures in Al2O3 after triple ion beam (H, He and/or N, O) irradiation were examined with cross-sectional TEM. Heavier ions penetration depths of He-and H-ions implantation enhanced growth of cavities produced by He- and H-ions, as compared with those produced by He-and H-ions only. Although peaks for He-implantation distribution are predicted by TRIM calculation to coincide with each other, cavity formation revealed the peaks to be separated appreciably
Keywords :
alumina; crystal defects; ion implantation; transmission electron microscopy; Al2O3; TRIM calculation; cavity formation; cross-sectional TEM; damage structure depth profiles; penetration depths; triple ion beam irradiation; Atomic beams; Dielectrics and electrical insulation; Electron beams; Fusion power generation; Fusion reactors; Helium; Ion beams; Materials science and technology; Nuclear power generation; Particle beam measurements;
Conference_Titel :
Ion Implantation Technology, 2000. Conference on
Conference_Location :
Alpbach
Print_ISBN :
0-7803-6462-7
DOI :
10.1109/.2000.924276
