• DocumentCode
    3116001
  • Title

    Implantation mode dependence of damage structure depth profiles in Al2O3 irradiated with triple beam of H, He and heavy ions

  • Author

    Katano, Y. ; Aruga, T. ; Yamamoto, S. ; Nakazawa, T. ; Yamaki, D.

  • Author_Institution
    Dept. of Mater. Sci., JAERI, Ibaraki, Japan
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    805
  • Lastpage
    808
  • Abstract
    The damage structures in Al2O3 after triple ion beam (H, He and/or N, O) irradiation were examined with cross-sectional TEM. Heavier ions penetration depths of He-and H-ions implantation enhanced growth of cavities produced by He- and H-ions, as compared with those produced by He-and H-ions only. Although peaks for He-implantation distribution are predicted by TRIM calculation to coincide with each other, cavity formation revealed the peaks to be separated appreciably
  • Keywords
    alumina; crystal defects; ion implantation; transmission electron microscopy; Al2O3; TRIM calculation; cavity formation; cross-sectional TEM; damage structure depth profiles; penetration depths; triple ion beam irradiation; Atomic beams; Dielectrics and electrical insulation; Electron beams; Fusion power generation; Fusion reactors; Helium; Ion beams; Materials science and technology; Nuclear power generation; Particle beam measurements;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ion Implantation Technology, 2000. Conference on
  • Conference_Location
    Alpbach
  • Print_ISBN
    0-7803-6462-7
  • Type

    conf

  • DOI
    10.1109/.2000.924276
  • Filename
    924276
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3116001