Vibration characterization of a MEMS 3D force sensor

MEMS devices and sensors in automotive applications are exposed to vibrations during service life. These vibrations can have a profound effect on the accuracy and reliability of the device. In this study a 3D force sensor, to be used in an automotive tire for the measurement of longitudinal and lateral forces is analysed. The study compromises two parts: First, a numerical analysis is performed to determine Eigen frequencies of the device and a stress strain analysis to determine allowable displacements before the sensor is damaged. Next, Eigen frequencies and mechanical fatigue resistance is evaluated by means of vibration exciter experiments. Additionally, a road test is performed on a test circuit to determine the robustness of the force sensor under actual automotive load conditions while attached to the rims of the wheels.