Title :
Piezoelectric membrane actuator design
Author :
Casset, F. ; Cueff, M. ; Defay, E. ; Rhun, G. Le ; Suhm, A. ; Ancey, P. ; Devos, A.
Author_Institution :
LETI, CEA, Grenoble, France
Abstract :
This paper presents the study of piezoelectric actuators. After the description of simulated actuators and simulation conditions, results will be discussed to define the best actuator design in terms of membrane displacement and compactness. The actuator behaviour under temperature variation is also checked.
Keywords :
finite element analysis; membranes; piezoelectric actuators; finite element analysis; membrane compactness; membrane displacement; piezoelectric membrane actuator design; Distance measurement; Equations; Mathematical model; Silicon; Stress; Switches;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on
Conference_Location :
Linz
Print_ISBN :
978-1-4577-0107-8
DOI :
10.1109/ESIME.2011.5765797
