Title :
High superconductor YBCO thin film evaporated on Ni metal layers
Author :
Verdyan, A. ; Azoulay, J.
Author_Institution :
Dept. of Sci., Holon Acad. Inst. of Technol., Israel
Abstract :
A report on our experimental study of the fabrication of YBCO thin film on Ni metal is presented. A simple inexpensive conventional vacuum system consists of a turbomolecular pump and featuring a base pressure better than 10-3 Pa was used for the YBCO thin film preparation. No device of any kind was applied to control or regulate the thickness or stoichiometry of the film during the evaporation process. During this stage of the evaporation process the substrate temperature was kept at 200°C monitored by a chromel-alumel thermocouple attached to a nearby dummy substrate. The solid phase reaction was subsequently carried out at a temperature of 720°C under low oxygen partial pressure of about 10 Pa for 20 minutes after which a further heat treatment was done at 490°C for 40 minutes. The films thus obtained were evaluated for their electrical and structural properties
Keywords :
barium compounds; heat treatment; high-temperature superconductors; stoichiometry; superconducting thin films; superconducting transition temperature; vacuum deposition; yttrium compounds; 200 degC; 490 degC; 720 degC; Ni; Ni metal layers; YBa2Cu3O7; chromel-alumel thermocouple; evaporation; heat treatment; solid phase reaction; stoichiometry; substrate temperature; thickness; thin film; Fabrication; Monitoring; Substrates; Superconducting epitaxial layers; Superconducting thin films; Temperature; Thickness control; Transistors; Vacuum systems; Yttrium barium copper oxide;
Conference_Titel :
Electrical and electronic engineers in israel, 2000. the 21st ieee convention of the
Conference_Location :
Tel-Aviv
Print_ISBN :
0-7803-5842-2
DOI :
10.1109/EEEI.2000.924315
