Title :
Fabrication of an all-metal atomic force microscope probe
Author :
Rasmussen, Jan P. ; Tang, Peter T. ; Sander, Curt ; Hansen, Ole ; Moller, P.
Author_Institution :
Microelectron. Centre, Tech. Univ. Denmark, Lyngby, Denmark
Abstract :
This paper presents a method for fabrication of an all-metal atomic force microscope probe (tip, cantilever and support) for optical read-out, using a combination of silicon micro-machining and electroforming. The paper describes the entire fabrication process for a nickel AFM-probe. In addition the first measurements with the new probe are presented
Keywords :
atomic force microscopy; electroforming; elemental semiconductors; micromachining; microsensors; silicon; AFM; Ni AFM-probe; STM; Si micromachining; atomic force microscope probe; cantilever; electroforming; electroplating; fabrication; optical read-out; thermal expansion; thick resist; tip; Atom optics; Atomic force microscopy; Nickel; Optical device fabrication; Optical films; Optical microscopy; Optical sensors; Probes; Resists; Silicon;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613686
