Title :
Porous silicon-based potassium ion selective electrode
Author :
Zhu, Ziqiang ; Shi, Yanling ; Ding, Yanfang ; Zhu, Jianzhong ; Lu, Wei ; Zi, Jian
Author_Institution :
Sch. of Inf. Sci. & Technol., East China Normal Univ., Shanghai, China
Abstract :
Porous silicon (PS)-based potassium ion selective microelectrode (K+ISME) was fabricated by using microelectronic planar process and electrochemical anodization etching technique. The apparent sensing area of the K+ISME is 8 mm by 8 mm. The calibration curve for the K+ISME is linear within a wide range of pK=1.0∼4.0. Its slope is 56 mV per decade, which is near Nernst response. The long-term stability of the K+ISME is good. The variation of the response is within ±2 mV during 2 months. Good performances of the K+ISME are attributed to large specific surface area and easily modified microstructure of PS.
Keywords :
anodisation; calibration; chemical sensors; elemental semiconductors; etching; microelectrodes; microsensors; porous semiconductors; potassium; silicon; stability; 2 month; 8 mm; K; K+ISME; PS-based potassium ion selective microelectrode; Si; apparent sensing area; electrochemical anodization etching technique; linear calibration curve; long-term stability; microelectronic planar process; modifiable microstructure; near Nernst response; porous silicon-based potassium ion selective electrode; response variation; specific surface area; Chemical sensors; Current; Electrodes; Etching; Information science; Microelectrodes; Microstructure; Physics; Silicon; Stability;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426116