DocumentCode :
3117149
Title :
On the nonlinear behaviour of MEMS resonators
Author :
Comi, C. ; Corigliano, A. ; Langfelder, G. ; Longoni, A. ; Tocchio, A.
Author_Institution :
Dept. of Struct. Eng., Politec. di Milano, Milan, Italy
fYear :
2011
fDate :
18-20 April 2011
Firstpage :
42375
Lastpage :
42527
Abstract :
This work is focussed on the nonlinear dynamic response of electrostatically actuated micro-resonators. A single span beam axially constrained at both end, possibly with elastic constraints, is considered as representative of different common layout of micro-resonators. An analytical model, based on the Hamilton´s principle, accounting for mechanical and electrical nonlinearities is derived. The analytical prediction is compared with experimental measurements obtained on a L-shaped micro-resonator.
Keywords :
dynamic response; micromechanical resonators; Hamilton principle; L-shaped microresonator; MEMS resonator; electrical nonlinearity; electrostatically actuated microresonator; mechanical nonlinearity; nonlinear behaviour; nonlinear dynamic response; single span beam; Equations; Hysteresis; Micromechanical devices; Nonlinear optics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on
Conference_Location :
Linz
Print_ISBN :
978-1-4577-0107-8
Type :
conf
DOI :
10.1109/ESIME.2011.5765821
Filename :
5765821
Link To Document :
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