DocumentCode :
3117172
Title :
A simple and high effective tellurium based sensor for NO2 detection
Author :
Tsiulyanu, Dumitru ; Marian, Svetlana ; Liess, Martin ; Liess, Hans-Dieter ; Eisele, Ignaz
Author_Institution :
Tech. Univ. of Moldova, Chisinau, Moldova
fYear :
2004
fDate :
24-27 Oct. 2004
Firstpage :
134
Abstract :
A simple and stable NO2 gas sensor device with rapid response/recovery time and low operating temperature has been developed using polycrystalline tellurium. The effect of thickness of the sample, thermal treatment and temperature to sensitivity against NO2 is presented for the first time. The sensitivity strongly increases with thickness of the film decreasing, especially at thickness less than 100 nm. Thermal treatment of the films (at temperatures greater than 100°C) and increasing of operating temperature above 80°C result in decrease of sensitivity to NO2, while it strongly improves the response and recovery times. By conditions of best compromise between the main sensing parameters, achieved at operating temperature 50°C, there are no noticeable drifts of baseline or of gas induced current. The sensing mechanism is explained by interaction of adsorbed species with lone-pair electrons, which form the upper part of the valence band.
Keywords :
adsorption; electric current; electron device testing; gas sensors; heat treatment; nitrogen compounds; tellurium; valence bands; 100 C; 100 nm; 50 C; 80 C; NO2; NO2 detection; Te; adsorbed species lone-pair electron interaction; baseline drift; gas induced current; gas sensor; operating temperature; polycrystalline tellurium; recovery time; response time; sample thickness effect; sensing mechanism; sensing parameters; sensitivity; tellurium based sensor; temperature effect; thermal treatment; valence band; Electrodes; Environmentally friendly manufacturing techniques; Gas detectors; Indium; Monitoring; Nitrogen; Pollution; Tellurium; Temperature sensors; Time factors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
Type :
conf
DOI :
10.1109/ICSENS.2004.1426118
Filename :
1426118
Link To Document :
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