Title :
Thin-film ZnO ultrasonic transducers for tissue characterization
Author :
Ito, Yukio ; Yokosawa, Koichi ; Sano, Shyuzo ; Shinomura, Ryuichi ; Sato, Yutaka
Author_Institution :
Res. & Dev. Center, Hitachi Med. Corp., Chiba, Japan
Abstract :
Thin-film ZnO ultrasonic transducers for operation at 140 MHz mounted in a rod-shaped probe were fabricated and evaluated for use in tissue characterization. Highly oriented ZnO films 12.5-μm thick were successfully grown for use as transducers having sufficient sensitivity to detect small ultrasound signals inside living samples. The ZnO transducer was mounted in the rod-shaped probe which could rotate mechanically around its axis and shift along the axis. Using this scanning, tissue images were formed in the C-scan mode in a cylindrical plane within the tissue. Preliminary bovine kidney images demonstrate the feasibility of tissue imaging using the miniature, high-frequency transducers mounted in the rod-shaped probe
Keywords :
acoustic transducers; biomedical ultrasonics; kidney; ultrasonic transducers; zinc compounds; 140 MHz; C-scan imaging; ZnO; bovine kidney; living tissue; rod-shaped probe; thin-film ZnO ultrasonic transducer; Acoustic transducers; Backscatter; Frequency; Lenses; Microscopy; Probes; Transistors; Ultrasonic imaging; Ultrasonic transducers; Zinc oxide;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.602715
