Title :
Piezoelectric and pyroelectric microsystems based on ferroelectric thin films
Author_Institution :
Lab. de Ceramique, Ecole Polytech. Fed. de Lausanne, Switzerland
Abstract :
The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in ultrasonic micromotors and pyroelectric infra-red detectors. The deposition of such films and the principal processes for their integration onto silicon substrates are fairly well mastered. Current efforts concentrate on tailoring the film properties for the various applications, and on optimization of the device designs and patterning processes
Keywords :
ferroelectric thin films; infrared detectors; lead compounds; micromotors; piezoceramics; pyroelectric detectors; ultrasonic motors; PZT; PbZrO3TiO3; deposition; device fabrication; ferroelectric thin film; integration; piezoelectric microsystem; pyroelectric infrared detector; silicon substrate; ultrasonic micromotor; Fabrication; Ferroelectric films; Ferroelectric materials; Infrared detectors; Micromotors; Piezoelectric films; Pyroelectricity; Semiconductor films; Silicon; Substrates;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.602725
