Characterization of a high-sensitivity micromachined tunneling accelerometer

Author

Liu, C.H. ; Grade, J.D. ; Barzilai, A.M. ; Reynolds, J.K. ; Partridge, A. ; Rockstad, H.K. ; Kenny, T.W.

Author_Institution

Dept. of Mech. Eng., Stanford Univ., CA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

471

Abstract

We have fabricated successfully and tested a new micromachined tunneling accelerometer. This accelerometer is a prototype intended for underwater acoustics applications, and is required to feature micro-g resolution at frequencies between 5 Hz and 1 kHz. This paper will focus on the experiments carried out in our laboratory to test the tunneling transducer as well as on the experimental determination of accelerometer resolution. The goal of this paper is to outline the measurements which are necessary to verify that the sensor is actually tunneling, and to confirm that the accelerometer performance is consistent with what should be expected from a tunneling accelerometer

Keywords

accelerometers; dynamic response; electron device testing; laser beam applications; microsensors; tunnelling; underwater sound; 5 Hz to 1 kHz; accelerometer resolution; dynamic responsivity; electron tunnelling; feedback; high-sensitivity micromachined tunneling accelerometer; laboratory; laser vibrometer; micro-g resolution; test; tunneling transducer; underwater acoustics applications; Accelerometers; Acoustic testing; Current measurement; Electrostatic measurements; Laboratories; Position measurement; Transducers; Tunneling; Vibrometers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613688

Filename

613688