Electrophoretic deposition of PZT ceramic films

Lead zirconate titanate thin films have been deposited by electrophoresis from suspensions of commercial PZT powder in acetone with additions of nitric acid and nitrocellulose. The effect of the incorporation of a sintering aid on the films is examined. Films up to 32 μm thick can be produced by a multiple deposition and sintering method. Measurements of dielectric constant and dielectric loss as functions of frequency have been made before and after poling. The undoped films had a pyroelectric coefficient of 266 μCm^-2 K^-1 and a pyroelectric figure of merit of 1.28×10^-5 Pa^-1/2 whereas the films with sintering aid had a pyroelectric coefficient of 343 μCm^-2 K^-1 and a pyroelectric figure of merit of 1.24×10^-5 Pa^-1/2